Tokyo Electron Ltd. (TEL):

Strategies, Technologies, Markets

TABLE OF CONTENTS

Chapter 1

Introduction 

1-1

Chapter 2

Business Strategies

2-1

2.1

Introduction

2-1

2.2

Business Units

2-2

2.3

TEL’s Strengths

2-5

2.4

TEL’s Globalization

2-6

2.4.1

Europe

2-7

2.4.2

U.S.

2-8

2.4.3

Asia

2-9

2.4.4

Japan

2-10

2.5

TEL’s  Business Continuity Plan (BCP)

2-10

2.6

Legal Strategies

2-13

2.7

Financial Analysis

2-15

Chapter 3

Technology Strategies

3-1

3.1

Introduction

3-1

3.2

Collaborative Research

3-4

3.2.1

IMEC (Part 1)

3-4

3.2.2

SiLKnet Alliance

3-5

3.2.3

HALCA

3-5

3.2.4

Canon

3-6

3.2.5

International Sematech

3-6

3.2.6

Albany R&D Center

3-7

3.2.7

IBM

3-8

3.2.8

IMEC (Part 2)

3-9

3.2.9

CEA LETI

3-10

3.3

Joint Ventures

3-11

3.3.1

Thermco

3-11

3.3.2

Honeywell Electronic Materials

3-11

3.3.3

Dow Chemical

3-12

3.3.4

Nikon

3-13

3.3.5

Ultratech/VSEA

3-13

3.3.6

Toshiba/Ebara/DNS

3-15

3.3.7

Teseda

3-16

3.3.8

Nikon

3-17

3.3.9

Clariant

3-17

3.3.10

Mattson Technology

3-18

3.3.11

Nanometrics

3-18

3.4

Technology Investments

3-19

3.4.1

Allegro Manufacturing

3-19

3.4.2

Molecular Imprints

3-20

3.5

Technology Purchases/Divestments

3-20

3.5.1 

Timbre Technologies

3-20

3.5.2

Brooks Automation

3-21

3.5.3

Metron Technology

3-22

3.5.4

WaferMasters

3-22

3.5.5

Therma-Wave

3-23

3.6

Technology Distribution

3-23

3.6.1

FEI

3-23

3.6.2

VSEA

3-24

3.6.3

Yield Dynamics

3-24

3.6.4

NuTool

3-26

3.6.5

Bede Scientific Instruments

3-26

3.6.6

Isilon Systems

3-27

3.6.7

Rudolph Technologies

3-28

Chapter 4

Product  Strategies

4-1

4.1

Introduction

4-1

4.2

Semiconductor Equipment

4-2

4.2.1

Advanced Inspection & Metrology

4-2

4.2.2

Clean Track

4-2

4.2.3

Etch Systems

4-4

4.2.4

Single Wafer Deposition

4-4

4.2.5

Surface Preparation Systems

4-7

4.2.6

Timbre Products

4-9

4.2.7

Thermal Processing Systems

4-9

4.2.8

Test Systems

4-10

4.3

FPD Equipment

4-13

Chapter 5

Competition And Market Forecasts

5-1

5.1

Market Drivers

5-1

5.1.1

Semiconductor Market

5-1

5.1.2

Industry Trends

5-5

5.1.3

Economic Trends

5-11

5.2

Competing to be a Global Market Leader

5-14

5.3

Market Size and Market Shares

5-17

5.3.1

Clean Track Market

5-17

5.3.1.1

Coater/Developer

5-17

5.3.1.2

Spin-On Deposition (SOD)

5-21

5.3.2

Etch System Market

5-25

5.3.1.3

Dielectric Etch

5-25

5.3.1.4

Polysilicon Etch

5-29

5.3.3

Deposition System Market

5-33

5.3.3.1

Vertical Tube CVD

5-33

5.3.3.2

Non-tube CVD

5-37

5.3.4

Surface Preparation System Market

5-41

5.3.4.1

Auto Wet Station

5-41

5.3.4.2

Spray Processing System

5-45

5.3.4.3

Wafer Scrubber

5-49

5.3.5

Thermal Processing System Market

5-53

5.3.6

Wafer Prober Market

5-57

TABLES

5.1

Worldwide Capital Spending 1998 - 2004

5-12

5.2

Top Semiconductor Equipment Revenues 1984-2004

5-15

5.3

TEL’s Share Of Equipment Market Sectors 2001-2004

5-16

5.4

Worldwide Coater/Developer Market Forecast

5-18

5.5

Worldwide Coater/Developer Market Shares 2001-2004

5-19

5.6

Worldwide Spin-On Deposition (SOD) Market Forecast

5-22

5.7

Worldwide Spin-On Deposition (SOD) Market Shares 2001-2004

5-23

5.8

Worldwide Dielectric Dry Etch Market Forecast

5-26

5.9

Worldwide Dielectric Dry Etch Market Shares 2001-2004

5-27

5.10

Worldwide Polysilicon Dry Etch Market Forecast

5-30

5.11

Worldwide Polysilicon Dry Etch Market Shares 2001-2004

5-31

5.12

Worldwide Vertical Tube CVD Market Forecast

5-34

5.13

Worldwide Vertical Tube CVD Shares 2001-2004

5-35

5.14

Worldwide Non-tube CVD Market Forecast

5-38

5.15

Worldwide Non-tube CVD Market Shares 2001-2004

5-39

5.16

Worldwide Auto Wet Station Market Forecast

5-42

5.17

Worldwide Auto Wet Station Market Shares 2001-2004

5-43

5.18

Worldwide Spray Processing System Market Forecast

5-46

5.19

Worldwide Spray Processing System Market Shares 2001-2004

5-47

5.20

Worldwide Wafer Scrubber Market Forecast

5-50

5.21

Worldwide Wafer Scrubber Market Shares 2001-2004

5-51

5.22

Worldwide Thermal Processing System Market Forecast

5-54

5.23

Worldwide Thermal Processing System Shares 2001-2004

5-55

5.24

Worldwide Wafer Prober Market Forecast

5-58

5.25

Worldwide Wafer Prober Market Shares 2001-2004

5-59

FIGURES